2018-3-17(Leak rate ) : (1) PMPUMP Down 1~2;chamber Run,chamble chamber GAS (2),chamber, Alarm?
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Get PriceTranslate this page2018-3-17(Leak rate ) 答: (1) 在PM后PUMP Down 1~2小时后;为确保chamber Run 货时,无大气进入chamble 影响chamber GAS 成份(2) 在日常测试时,为确保chamber 内来自大气的泄漏源,故需测漏 机台发生Alarm时应如何处理?
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