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cf4 leak testing toshiba

cf4 leak testing toshiba

2018-3-17(Leak rate ) : (1) PMPUMP Down 1~2;chamber Run,chamble chamber GAS (2),chamber, Alarm?

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  • 中芯国际员工漫谈半导体代工企业内幕下

    Translate this page2018-3-17(Leak rate ) 答: (1) 在PM后PUMP Down 1~2小时后;为确保chamber Run 货时,无大气进入chamble 影响chamber GAS 成份(2) 在日常测试时,为确保chamber 内来自大气的泄漏源,故需测漏 机台发生Alarm时应如何处理?

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