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sf6 o2 recharge kit GE

sf6 o2 recharge kit GE

(PDF) High-temperature etching of SiC in SF6/O2 ...Camara, N. Zekentes, K. Study of the reactive ion etching o f 6H–SiC and 4H–SiC in SF6/Ar plasmas by op tical emission spec- troscopy and laser interferom etry. Solid-State Electron. 46 ...

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  • High-temperature etching of SiC in SF6/O2

    Camara, N. Zekentes, K. Study of the reactive ion etching o f 6H–SiC and 4H–SiC in SF6/Ar plasmas by op tical emission spec- troscopy and laser interferom etry. Solid-State Electron. 46

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  • ROBERTO AMBROSIO | Research Associate | Ph. D. in

    Title: Ph. D. in electronic science

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