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sulfur hexafluoride process

sulfur hexafluoride process

The invention provides a simple, economical method for recovering SF6from a gas stream. The process of the invention comprises contacting a feed gas stream comprising a minor amount of SF6with a membrane under conditions suitable to form a SF6-rich retentate gas stream and a SF6-poor permeate gas stream.

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  • Process for measuring degradation of sulfur hexafluoride

    Sulfur hexafluoride, SF 6, is a gas used as an insulator in conjunction with solid insulating material in high voltage systems such as transmission lines, substations and switchgear. In the course of operating such high voltage systems electrical discharges can occur in the form of coronas, arcs or sparks.Cited by: 7

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  • inorganic chemistry - Sulfur hexafluoride creation process

    2021-2-5Sulfur hexafluoride is collected in the cold trap. The product contains various impurities, such as F X 2, H F, S O F X 2, S O X 2 F X 2, S F X 2, S X 2 F X 2, S F X 4, and S X 2 F X 10. Most of the impurities are easily hydrolysable; therefore the gas is passed through a washing bottle filled with K O H solution.

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  • Solvay Special Chemicals

    2018-8-273ContCes5ElcroCiea E. SF6as a process gas in the semiconductor industry. Sulphur hexafluoride is more and more used for the manufacturing of semicon - ductor devices such as IC (integrated cir - cuits), flat panels, photovoltaic panels and MEMS (Micro-Electro-Mechanical-Sys - tems).

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  • Index of Semiconductor Process Gases - Sulfur

    44 rows2009-12-31Index of Semiconductor Process Gases - SulfurT K$$ \FRAC{C_P^0(…VAPOR PRESSUR…B(T) CM3 MOL-1Estimated Uncert…1%/0.1%1%Gas densities areReference1,565223*9.170.23-528.8225*9.250.25-518.2See all 44 rows on www.nist.gov

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  • US5843208A - Process for recovering sulfur

    The invention provides a simple, economical method for recovering SF6from a gas stream. The process of the invention comprises contacting a feed gas stream comprising a minor amount of SF6with a membrane under conditions suitable to form a SF6-rich retentate gas stream and a SF6-poor permeate gas stream.Cited by: 26

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  • Abatement of Sulfur Hexafluoride Emissions from the

    2018-11-12Abatement of Sulfur Hexafluoride Emissions from the Semiconductor Manufacturing Process by Atmospheric-Pressure Plasmas How Ming Lee, Moo Been Chang, and Kuan Yu Wu Graduate Institute of Environmental Engineering, National Central University, Taiwan ABSTRACT Sulfur hexafluoride (SF 6) is an importantCited by: 62

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  • Modeling and Simulation of Sulfur Hexafluoride

    Liquid sulfur hexafluoride (SF6) contains carbon tetrachloride (CF4) and air as main impurities. It is very difficult to remove these impurities by using a catalyst column or an adsorption column....

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  • Sulfur hexafluoride purification from mixtures with air: a

    Using a molecular sieve concentration trap and previously developed laboratory electron capture chromatographic procedures, sulfur hexafluoride was determined from 40 cm/sup 3/ samples with levels as low as 0.03 x 10/sup -12/ cm/sup 3//cm/sup 3/ - more than an order of magnitude below the present tropospheric SF/sub 6/

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  • Modeling and simulation of Sulfur Hexafluoride (SF 6

    2000-3-1Liquid sulfur hexafluoride (SF 6) contains carbon tetrachloride (CF 4) and air as main impurities. It is very difficult to remove these impurities by using a catalyst column or an adsorption column. In this work a new purification method for SF 6 mixture based on batch distillation is proposed.Cited by: 1

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