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sf6 o2 device GE

The impact of the O2 content in SF6-O2 gas mixtures on the etch rate and sidewall profile of silicon (Si), germanium (Ge), and phosphorous doped germanium (Ge:P) in reactive ion etching has been studied. The characteristics of etch rate and sidewall profile are greatly affected by the O2 content.

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  • Precision plasma etching of Si, Ge, and Ge:P by SF6 with

    The impact of the O2 content in SF6-O2 gas mixtures on the etch rate and sidewall profile of silicon (Si), germanium (Ge), and phosphorous doped germanium (Ge:P) in reactive ion etching has been

    Get Price
  • Precision plasma etching of Si, Ge, and Ge:P by SF6 with

    2019-3-18The impact of the O 2 content in SF 6-O 2 gas mixtures on the etch rate and sidewall profile of silicon (Si), germanium (Ge), and phosphorous doped germanium (Ge:P) in reactive ion etching has been studied. The characteristics of etch rate and sidewall profile are greatly affected by the O 2 content. Below 50% of O 2 content, a large variation in GeCited by: 6

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  • Comparison of etching processes of silicon and

    As a result, with a SF6-O2 proportion of 60%, an optimized RMS roughness of 0.9 nm has been revealed for Ge surfaces after etching with a selectivity of over 4 for vertical etching to horizontal

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  • Precision plasma etching of Si, Ge, and Ge:P by SF6 with

    The impact of the O2 content in SF6-O2 gas mixtures on the etch rate and sidewall profile of silicon (Si), germanium (Ge), and phosphorous doped germanium (Ge:P) in reactive ion etching has been studied. The characteristics of etch rate and sidewall profile are greatly affected by the O2 content. Below 50% of O2 content, a large variation in Ge

    Get Price
  • Precision plasma etching of Si, Ge, and Ge:P by SF6 with

    The impact of the O2 content in SF6-O2 gas mixtures on the etch rate and sidewall profile of silicon (Si), germanium (Ge), and phosphorous doped germanium (Ge:P) in reactive ion etching has been studied. The characteristics of etch rate and sidewall profile are greatly affected by the O2 content.Cited by: 6

    Get Price
  • Precision plasma etching of Si, Ge, and Ge:P by SF6 with

    2014-5-1adshelp[at]cfa.harvard.edu The ADS is operated by the Smithsonian Astrophysical Observatory under NASA Cooperative Agreement NNX16AC86ACited by: 6

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  • Green Gas for Grid - g3 - SF6 Free Solutions

    g³, G3 (pronounced g cubed) is GEs game-changing alternative to SF 6 SF6 gas, developed for HV electrical transmission equipment. g³ G3 products feature the same ratings and same dimensional footprint as the state-of-the-art SF 6 SF6What is GE’s g3?g³, (pronounced g cubed) is GEs game-changing alternative to SF6 gas, developed for HV electrical transmission equipment.Is there an alternative gas to SF6 for HV equipment?Yes, there is GE’s green gas for grids, g3 pronounced gcubed that is GEs game-changing alternative to SF6 gas, developed for HV electrical transmi...Can I replace SF6 by g3 in existing HV equipment?Direct retrofit is not possible. However, retrofits could be possible in some specific cases, though not with strictly identical performance or ope...Is GE’s g3 gas dangerous or toxic?GE’s g3 green gas is an inorganic, colorless, odorless, non- flammable, non-toxic gas, exactly like SF6.Does GE have SF6-free switchgear?GE’s manufactures g3 high voltage products as an alternative to SF6. These products are type-tested and available for live-tank circuit breakers an...

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  • Single Step Cryogenic SF6O2 Plasma

    Translate this pagewenku.baidu.com›百度文库›互联网2011-6-23Single Step Cryogenic SF6/O2 Plasma Etching Process for the Development of Inertial Devices G. Craciun1, H. Yang1, H. W. van Zeijl2, L. Pakula1, M. A. Blauw2, E. van der Drift2 and P. J. French1 2 Delft University of Technology - ITS/EI, Mekelweg 4

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  • Cheap Sf6 Detection System Honeywell

    750kv-substation-onsite-service. On-site SF6 recovery service is driven by a trailer which equipped with our full set of recovery, refilling, purification equipment and measuring instrument, drive to the substandard gas compartment, perform onsite shutdown and maintenance, directly recover unqualified SF6 gas, recycle and

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  • Sulfur hexafluoride - Wikipedia

    2021-3-18Sulfur hexafluoride (SF6) or sulphur hexafluoride (British spelling), is an extremely potent and persistent greenhouse gas that is primarily utilized as an electrical insulator and arc suppressant.[7][8] It is inorganic, colorless, odorless, non-flammable, and non-toxic. SF 6 has an octahedral geometry, consisting of sixChemical formula: SF₆

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