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Sulfur Hexafluoride (SF6) is an inorganic, colorless, odorless, and non-flammable gas. SF6 primary use is in the electrical industry as a gaseous dielectric medium for various voltage circuit breakers, switchgear and other electrical equipment, often replacing oil filled circuit breakers (OCBs) that can contain harmful PCBs.Get Price
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Etch rates of Kapton H polyimide film in SF6-O2 plasmas (0.25 torr) were studied as a function of the input gas mixture, the excitation frequency (25–450 kHz; 13.56 MHz), and the biasing mode.